@book{23337,
	author = {Allen, Robert, ed.},
	title = {Advances in Resist Materials and Processing Technology XXVIII},
	publisher = {SPIE},
	year = {2011},
	series = {Proceedings of SPIE; V. 7972},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7972}
}