TY  - BOOK
AU  - Allen, Robert, ed.
TI  - Advances in Resist Materials and Processing Technology XXVII
T2  - Proceedings of SPIE; V. 7639
SN  - 9780819480538 (Print)
PY  - 2010///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7639
ER  -