@book{23336,
	author = {Allen, Robert, ed.},
	title = {Advances in Resist Materials and Processing Technology XXVII},
	publisher = {SPIE},
	year = {2010},
	series = {Proceedings of SPIE; V. 7639},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7639}
}