TY  - BOOK
AU  - Henderson, Clifford, ed.
TI  - Advances in Resist Materials and Processing Technology XXVI
T2  - Proceedings of SPIE; V. 7273
SN  - 9780819475268 (Print)
PY  - 2009///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7273
ER  -