@book{23335,
	author = {Henderson, Clifford, ed.},
	title = {Advances in Resist Materials and Processing Technology XXVI},
	publisher = {SPIE},
	year = {2009},
	series = {Proceedings of SPIE; V. 7273},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7273}
}