TY  - BOOK
AU  - Henderson, Clifford, ed.
TI  - Advances in Resist Materials and Processing Technology XXV
T2  - Proceedings of SPIE; V. 6923
SN  - 9780819471086 (Print)
PY  - 2008///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6923
ER  -