00527nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245007200121260003200193300002000225490003300245856010300278IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819471086 (Print)  cIIA Library  aHenderson, Clifford, ed. 0aAdvances in Resist Materials and Processing Technology XXVh[eBook]  aWashington, USAbSPIEc2008  aOnline resource  aProceedings of SPIE; V. 6923  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6923yClick Here to Access eBook