@book{23334,
	author = {Henderson, Clifford, ed.},
	title = {Advances in Resist Materials and Processing Technology XXV},
	publisher = {SPIE},
	year = {2008},
	series = {Proceedings of SPIE; V. 6923},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6923}
}