00754nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245007300124260003200197300002000229490003300249856010300282942000700385999001700392952016300409IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819489814 (Print)  cIIA Library  aSomervell, Mark, ed.941872 0aAdvances in Resist Materials and Processing Technology XXIXh[eBook]  aWashington, USAbSPIEc2012  aOnline resource  aProceedings of SPIE; V. 8325  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8325yClick Here to Access eBook  cEB  c23333d23333  00104070aBANbBANd2011-07-01eSPIEhV. 8325l0pEB2793r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8325w2021-11-05yEB