00746nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002400092245007300116260003200189300002000221490003300241856010300274942000700377999001700384952016300401IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819466389 (Print)  cIIA Library  aLin, Qinghuang, ed. 0aAdvances in Resist Materials and Processing Technology XXIVh[eBook]  aWashington, USAbSPIEc2007  aOnline resource  aProceedings of SPIE; V. 6519  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6519yClick Here to Access eBook  cEB  c23332d23332  00104070aBANbBANd2011-07-01eSPIEhV. 6519l0pEB2792r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6519w2021-11-05yEB