@book{23318,
	author = {Gronheid, Roel, ed.},
	title = {Advances in Patterning Materials and Processes XXXVII},
	publisher = {SPIE},
	year = {2020},
	series = {Proceedings of SPIE; V. 11326},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11326}
}