TY  - BOOK
AU  - Gronheid, Roel, ed.
TI  - Advances in Patterning Materials and Processes XXXVI
T2  - Proceedings of SPIE; V. 10960
SN  - 9781510625679 (Print)
PY  - 2019///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10960
ER  -