00557nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002400119245006600143260003200209300002000241490003400261856010400295IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510625679 (Print)  a9781510625686 (Online)  cIIA Library  aGronheid, Roel, ed. 0aAdvances in Patterning Materials and Processes XXXVIh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 10960  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10960yClick Here to Access eBook