Gronheid, Roel, ed. <br/><br/>
Advances in Patterning Materials and Processes XXXVI  [eBook] 

 - Washington, USA  SPIE  2019 
 - Online resource 
 - Proceedings of SPIE; V. 10960 .
<br/><br/><label>ISBN: </label>9781510625679 (Print) 9781510625686 (Online)