@book{23317,
	author = {Gronheid, Roel, ed.},
	title = {Advances in Patterning Materials and Processes XXXVI},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 10960},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10960}
}