00558nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002600119245006500145260003200210300002000242490003400262856010400296IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510616646 (Print)  a9781510616653 (Online)  cIIA Library  aHohle, Christoph, ed. 0aAdvances in Patterning Materials and Processes XXXVh[eBook]  aWashington, USAbSPIEc2018  aOnline resource  aProceedings of SPIE; V. 10586  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10586yClick Here to Access eBook