Hohle, Christoph, ed. <br/><br/>
Advances in Patterning Materials and Processes XXXV  [eBook] 

 - Washington, USA  SPIE  2018 
 - Online resource 
 - Proceedings of SPIE; V. 10586 .
<br/><br/><label>ISBN: </label>9781510616646 (Print) 9781510616653 (Online)