@book{23316,
	author = {Hohle, Christoph, ed.},
	title = {Advances in Patterning Materials and Processes XXXV},
	publisher = {SPIE},
	year = {2018},
	series = {Proceedings of SPIE; V. 10586},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10586}
}