TY  - BOOK
AU  - Hohle, Christoph, ed.
TI  - Advances in Patterning Materials and Processes XXXIV
T2  - Proceedings of SPIE; V. 10146
SN  - 9781510607439 (Print)
PY  - 2017///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10146
ER  -