00559nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002600119245006600145260003200211300002000243490003400263856010400297IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510607439 (Print)  a9781510607446 (Online)  cIIA Library  aHohle, Christoph, ed. 0aAdvances in Patterning Materials and Processes XXXIVh[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10146  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10146yClick Here to Access eBook