Hohle, Christoph, ed. <br/><br/>
Advances in Patterning Materials and Processes XXXIV  [eBook] 

 - Washington, USA  SPIE  2017 
 - Online resource 
 - Proceedings of SPIE; V. 10146 .
<br/><br/><label>ISBN: </label>9781510607439 (Print) 9781510607446 (Online)