@book{23315,
	author = {Hohle, Christoph, ed.},
	title = {Advances in Patterning Materials and Processes XXXIV},
	publisher = {SPIE},
	year = {2017},
	series = {Proceedings of SPIE; V. 10146},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10146}
}