@book{23314,
	author = {Hohle, Christoph, ed.},
	title = {Advances in Patterning Materials and Processes XXXIII},
	publisher = {SPIE},
	year = {2016},
	series = {Proceedings of SPIE; V. 9779},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9779}
}