00516nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245006600116260003200182300002000214490003300234856010300267IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628415278 (Print)  cIIA Library  aWallow, Thomas, ed. 0aAdvances in Patterning Materials and Processes XXXIIh[eBook]  aWashington, USAbSPIEc2015  aOnline resource  aProceedings of SPIE; V. 9425  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9425yClick Here to Access eBook