TY  - BOOK
AU  - Wallow, Thomas, ed.
TI  - Advances in Patterning Materials and Processes XXXI
T2  - Proceedings of SPIE; V. 9051
SN  - 9780819499745 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9051
ER  -