00736nam a2200181Ia 4500003000900000008004100009020002600050040001600076100004300092245004500135260003200180300002000212490003300232856010300265942000700368999001700375952016200392IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892521807 (Print)  cIIA Library  aNarayanan, Balasubramanian, ed.941855 0aAdvances in Optical Metrology Ih[eBook]  aWashington, USAbSPIEc1978  aOnline resource  aProceedings of SPIE; V. 0153  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0153yClick Here to Access eBook  cEB  c23302d23302  00104070aBANbBANd2011-07-01eSPIEhV. 153l0pEB2762r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0153w2021-11-05yEB