TY - BOOK AU - Narayanan, Balasubramanian, ed. TI - Advances in Optical Metrology I T2 - Proceedings of SPIE; V. 0153 SN - 9780892521807 (Print) PY - 1978/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0153 ER -