00777nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002400092245010400116260003200220300002000252490003300272856010300305942000700408999001700415952016300432IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819454713 (Print)  cIIA Library  aKhounsary, Ali, ed. 0aAdvances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications IIh[eBook]  aWashington, USAbSPIEc2004  aOnline resource  aProceedings of SPIE; V. 5533  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5533yClick Here to Access eBook  cEB  c23280d23280  00104070aBANbBANd2011-07-01eSPIEhV. 5533l0pEB2740r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5533w2021-11-05yEB