Khounsary, Ali, ed. <br/><br/>
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II  [eBook] 

 - Washington, USA  SPIE  2004 
 - Online resource 
 - Proceedings of SPIE; V. 5533 .
<br/><br/><label>ISBN: </label>9780819454713 (Print)