TY  - BOOK
AU  - Khounsary, Ali, ed.
TI  - Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications
T2  - Proceedings of SPIE; V. 5193
SN  - 9780819450661 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5193
ER  -