TY  - BOOK
AU  - Tong, Qin-Yi, ed.
TI  - Advances in Microelectronic Device Technology
T2  - Proceedings of SPIE; V. 4600
SN  - 9780819443397 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4600
ER  -