Assoufid, Lahsen, ed. <br/><br/>
Advances in Metrology for X-Ray and EUV Optics VIII  [eBook] 

 - Washington, USA  SPIE  2019 
 - Online resource 
 - Proceedings of SPIE; V. 11109 .
<br/><br/><label>ISBN: </label>9781510629110 (Print) 9781510629127 (Online)