00557nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002600119245006400145260003200209300002000241490003400261856010400295IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510612273 (Print)  a9781510612280 (Online)  cIIA Library  aAssoufid, Lahsen, ed. 0aAdvances in Metrology for X-Ray and EUV Optics VIIh[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10385  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10385yClick Here to Access eBook