Assoufid, Lahsen, ed. <br/><br/>
Advances in Metrology for X-Ray and EUV Optics VII  [eBook] 

 - Washington, USA  SPIE  2017 
 - Online resource 
 - Proceedings of SPIE; V. 10385 .
<br/><br/><label>ISBN: </label>9781510612273 (Print) 9781510612280 (Online)