@book{23272,
	author = {Assoufid, Lahsen, ed.},
	title = {Advances in Metrology for X-Ray and EUV Optics VI},
	publisher = {SPIE},
	year = {2016},
	series = {Proceedings of SPIE; V. 9962},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9962}
}