00556nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002600119245006300145260003200208300002000240490003400260856010400294IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510637900 (Print)  a9781510637917 (Online)  cIIA Library  aAssoufid, Lahsen, ed. 0aAdvances in Metrology for X-Ray and EUV Optics IXh[eBook]  aWashington, USAbSPIEc2020  aOnline resource  aProceedings of SPIE; V. 11492  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11492yClick Here to Access eBook