00515nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245006300118260003200181300002000213490003300233856010300266IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819492180 (Print)  cIIA Library  aAssoufid, Lahsen, ed. 0aAdvances in Metrology for X-Ray and EUV Optics IVh[eBook]  aWashington, USAbSPIEc2012  aOnline resource  aProceedings of SPIE; V. 8501  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8501yClick Here to Access eBook