Assoufid, Lahsen, ed. <br/><br/>
Advances in Metrology for X-Ray and EUV Optics IV  [eBook] 

 - Washington, USA  SPIE  2012 
 - Online resource 
 - Proceedings of SPIE; V. 8501 .
<br/><br/><label>ISBN: </label>9780819492180 (Print)