TY  - BOOK
AU  - Assoufid, Lahsen, ed.
TI  - Advances in Metrology for X-Ray and EUV Optics III
T2  - Proceedings of SPIE; V. 7801
SN  - 9780819482976 (Print)
PY  - 2010///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7801
ER  -