Assoufid, Lahsen, ed. <br/><br/>
Advances in Metrology for X-Ray and EUV Optics III  [eBook] 

 - Washington, USA  SPIE  2010 
 - Online resource 
 - Proceedings of SPIE; V. 7801 .
<br/><br/><label>ISBN: </label>9780819482976 (Print)