00512nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245006000118260003200178300002000210490003300230856010300263IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819459268 (Print)  cIIA Library  aAssoufid, Lahsen, ed. 0aAdvances in Metrology for X-Ray and EUV Opticsh[eBook]  aWashington, USAbSPIEc2005  aOnline resource  aProceedings of SPIE; V. 5921  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5921yClick Here to Access eBook