@book{23174,
	author = {Bondur, James, ed.},
	title = {Advanced Techniques for Integrated Circuit Processing},
	publisher = {SPIE},
	year = {1991},
	series = {Proceedings of SPIE; V. 1392},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1392}
}