00545nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245009600115260003200211300002000243490003300263856010300296IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892524983 (Print)  cIIA Library  aLampert, Carl, ed. 0aAdvanced Semiconductor Processing/Characterization of Electronic/Optical Materialsh[eBook]  aWashington, USAbSPIEc1984  aOnline resource  aProceedings of SPIE; V. 0463  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0463yClick Here to Access eBook