@book{23138,
	author = {Lampert, Carl, ed.},
	title = {Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials},
	publisher = {SPIE},
	year = {1984},
	series = {Proceedings of SPIE; V. 0463},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0463}
}