TY  - BOOK
AU  - Malik, Roger, ed.
TI  - Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication
T2  - Proceedings of SPIE; V. 1676
SN  - 9780819408372 (Print)
PY  - 1992///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1676
ER  -