00548nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245010000114260003200214300002000246490003300266856010300299IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819408372 (Print)  cIIA Library  aMalik, Roger, ed. 0aAdvanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabricationh[eBook]  aWashington, USAbSPIEc1992  aOnline resource  aProceedings of SPIE; V. 1676  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1676yClick Here to Access eBook