@book{23137,
	author = {Malik, Roger, ed.},
	title = {Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication},
	publisher = {SPIE},
	year = {1992},
	series = {Proceedings of SPIE; V. 1676},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1676}
}