00510nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245005800118260003200176300002000208490003300228856010300261IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892528325 (Print)  cIIA Library  aMukherjee, Sayan, ed. 0aAdvanced Processing of Semiconductor Devicesh[eBook]  aWashington, USAbSPIEc1987  aOnline resource  aProceedings of SPIE; V. 0797  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0797yClick Here to Access eBook