TY  - BOOK
AU  - Wang, Yangyuan, ed.
TI  - Advanced Microlithography Technologies
T2  - Proceedings of SPIE; V. 5645
SN  - 9780819456007 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5645
ER  -