00502nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245005200116260003200168300002000200490003300220856010300253IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819456007 (Print)  cIIA Library  aWang, Yangyuan, ed. 0aAdvanced Microlithography Technologiesh[eBook]  aWashington, USAbSPIEc2005  aOnline resource  aProceedings of SPIE; V. 5645  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5645yClick Here to Access eBook